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High Voltage CV Measurement System CS-600A Series

High Voltage C-V Measurement System：CS-605A (5kV) / CS-603A (3kV)
Ideal for measuring the capacitance of power semiconductor devices such as SiC, GaN

  • Automated capacitance measurement up to 5kV (CS-605A) or 3kV (CS-603A) (with Sweep function)
  • Adapters for curve tracers compatible with various device packages can be used as is
  • Supports systematization with probe stations for capacitance measurement on wafers and chips
  • Capacitance measurement of capacitors for high voltage is also possible

* LCR meter is required separately.

Examples of measurement by CV Measurement Tool (PC software)

[Measurement example 1] Sweep measurement up to 2.5kV

[Measurement example 2] High resolution measurement up to 70V

Measurement block diagram

Specifications

CS-605ACS-603A
DC bias0-5kV / 0-50V0-3kV / 0-50V
Setting resolution100mV / 1mV
Measurement range10kHz 100pF～10nF　 ±5％(±50pF)
100kHz 10pF～1nF 　 ±5％(±2pF)
When Cgd：Cds：Cgs = 1：1：1, Cgd：Cds：Cgs = 1：10：100
Frequency range10kHz～100kHz
LCR meter
measurement signal level range		100mV～1V
Parameter for measurementCies, Ciss (input capacitance), Coes, Coss (output capacitance), Cres, Crss (reverse transmission capacitance),
CT (capacitance between terminals), Cgs, Cge/Cgd, Ccg/Cds, Cce (calculated value), Rg (gate resistance)
Measurement modeC-V：Capacitance vs. bias voltage, C-G：Capacitance vs. gate voltage, C-Time：Capacitance vs. time
Gate bias+/-25V at 1mV/step
TypeLinear/Log/List/Single
Sweep directionUP Sweep
Measurement point5,000 points
OtherWaveform comparison, REF display, with interlock function, external interlock (option)
External dimensions / weightApprox. 330W × 370D × 230H (mm) * Excluding protrusions / Approx. 8.5kg
Operating temperature range0℃～+40℃
Performance warranty temperature range23℃±5 ℃
Operating humidity range0～+40℃, 5%～80% RH (30°C, no condensation)
Upper limit value 55% RH (40°C, no condensation)
Power supply input rangeAC 100-240 V 50/60Hz
Power consumption35VA