SEMICONDUCTOR CURVE TRACER CS-8000 series
It is equipped with an SMU with a maximum voltage of 5kV and a maximum current of 2kA, has pulse output, gate pattern, and microcurrent measurement functions, and strongly supports design evaluation of wide-gap semiconductors such as SiC and GaN.
- Large 12.1-inch touchscreen
- Various GATE signal output functions
- Extensive temperature characteristic measurement options
- High-power on-wafer tests with prober
General Specifications
Gate voltage：±40 V
Voltage range：0.2 ～ 5 kV
Maximum measurement current：2 kA
Current measurement resolution：250 fA
Advantages during actual measurements
- Compatible with SiC and GaN devices
- Supports wafers and low-power devices
- High-power devices are also supported
- Supports microcurrent measurement
Easy to use UI
Equipped with a 12.1-inch TFT-LCD (1280×800) high-definition and large-screen display, it can be operated with a touch screen, the function keys on the front panel, and independent knobs for each function.
① X-Y display area
Any voltage/current parameters can be set on the X-axis and Y-axis respectively, and various semiconductor characteristic curves such as Vds-Id characteristics, threshold voltage, and Vds-Vgs saturation characteristics can be displayed. In addition, you can set multiple parameters on the Y-axis. Scale can be switched between Log and Linear.
②Y-T display area
The measurement applied waveform is displayed on the time axis like an oscilloscope. Since waveform abnormalities such as pulse width, measurement point, and oscillation can be checked in real time, it is easy to verify whether accurate measurements have been made. Since all applied waveform data can be saved at the same time as the data displayed in the X-Y display, the measurement results can be revalidated.
③Measured data display area
Detailed measurement results, measurement conditions, and status are displayed in text format.
④Configuration setting area
Sets the measurement configuration of a device. Supports the selection of voltage/current units, wiring changes, etc. in a graphical display
⑤Parameter setting area
This area is used to set measurement parameters and measurement limits, and to switch between manual and automatic measurements.
⑥Control panel
The front panel has buttons and rotary knobs for easy manual measurements. On the numeric keypad located in the center, you can enter numeric values for parameters. DRAIN/COLLECTOR, GATE/BASE, Manual measurement can be easily performed with vertical-axis and horizontal-axis rotary knobs.
Output sources tailored to the application
You can arbitrarily select the voltage and current units required for measurement according to the application.
The picture on the right shows,
Upper section：Test fixture
Lower section：High current unit
HV unit
This is a 2kV, 5kV high voltage unit. The DC/pulse wave can be selected. You can select constant voltage and constant current drive measurement.
| Main unit | CS-8200 | CS-8500 |
|---|---|---|
| Maximum voltage (Maximum current) | 2 kV (20 mA) | 5 kV (8 mA) |
| Waveform | DC, Pulse | |
| Polarity | Positive / negative | |
| Measurement current resolution | 250 fA | |
MV unit (common to all main units)
This is a medium voltage unit of 200V. You can select constant voltage and constant current drive measurement. In addition to DC and pulse, SIN, half-wave, and full-wave waveforms can be selected.
| Maximum voltage (Maximum current) | 200 V (2 A) |
| Waveform | DC(200 mA) , Pulse (2A), SIN, Half-wave , full-wave |
| Polarity | Positive / negative / both polarities |
| Measurement current resolution | 250 fA |
GATE unit (common to all main units)
This is a 40V unit. You can select constant voltage and constant current drive measurement. In addition to DC and pulse, SIN can be selected.
| Maximum voltage (maximum current) | 40 V (1 A) |
| Waveform | DC, pulse, SIN |
| Polarity | Positive / negative / both polarities |
| Measurement current resolution | 250 fA |
HC unit
The high-current mode supports high-current measurements up to 2,000A. Pulse width, measurement period, and measurement range can be varied
| CS-205 | CS-210 | CS-220 | |
|---|---|---|---|
| Maximum current (Voltage) | 500 A (50 V) | 1 kA (50 V) | 2 kA (50 V) |
| Waveform | Pulse | ||
| Pulse width | 10µs～1ms | 10µs～500µs | |
| Polarity | Positive / negative | ||
Minimum current resolution250 fA
By adopting triaxial and optimizing the measurement system, leakage and noise in the equipment are reduced, so stable measurement of micro-currents is possible.
Various GATE signal outputs
The GATE signal can be sequenced and applied.
Hold time variable range
0.000[s] ～ 5.000[s]
Preliminary signal voltage range
Gate -40[V] ～ +40[V]
Hysteresis measurement
The CS-8000 has useful functions for measuring wideband gap semiconductors such as SiC and GaN with hysteresis.
The double sweep function displays the UP sweep and DOWN sweep at the same time, so hysteresis can be observed.
Safety mechanism
In addition to the interlock function, it is equipped with an output limit function.
You can set the voltage, current, and power limits to prevent damage to the DUT.
In addition, the overcurrent protection function of the hardware shuts off the current when it flows 1.4 times the measurement range.
Combination configuration
The HC unit and fixture can be selected according to the voltage and current of the measurement target.
■ Configuration example When used with 2kV, 2,000A
Main unit：CS-8200
HC unit：CS-220
Test fixture：CS-322 HV/HC
Accessories
HV standard cable set CS-021
HC standard cable set CS-022
